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ATOMIC LAYER DEPOSITION  

Wednesday (26.09.2018)

10:45
Keynote Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing
Session starts at 10:45
ALD - Ideal2Real

Prof. Ola Nilsen Dr. Henrik Sønsteby

S1/03 - 226
11:15
Highlight Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing
Session starts at 10:45
Atomic-scale simulations of the mechanism of thermal atomic layer etch

Dr. Suresh Kondati Natarajan Dr. Simon D. Elliott

S1/03 - 226
11:30
Highlight Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing
Session starts at 10:45
Understanding the growth of multi-layered titania and alumina systems in atomic layer deposition

Dr. Robert Zierold Christoph Wiegand René Faust Alexander Meinhardt Prof. Dr. Robert Blick Prof. Dr. Kornelius Nielsch

S1/03 - 226
11:45
Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing
Session starts at 10:45
HfO2 interface formation by thermal and plasma assisted ALD oxide growth on Hf metal

Stephan Aussen Alexander Hardtdegen Dr. Alexander Meledin Prof. Regina Dittmann Dr. Susanne Hoffmann-Eifert

S1/03 - 226
12:00
Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.1: Fundamentals of Atomic Layer Processing
Session starts at 10:45
Atomic Layer Deposition: from molecular chemistry to nanocoatings

Ph.D. Pengmei Yu Dr. Mehtap Buyukyazi Christoph Bohr Dr. Mateusz Scigaj Prof. Dr. Sanjay Mathur Dr. Mariona Coll

S1/03 - 226
14:30
Highlight Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage
Session starts at 14:30
Advanced in Atomic Layer Deposition Techniques: Electrocatalyst for Hydrogen Evolution and Charge Transporting Layer for Perovskite Solar Cells

Prof. Dr. Hyunjung Shin

S1/03 - 226
14:45
Highlight Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage
Session starts at 14:30
Turning lead into gold: Inexpensive materials and accurate nanostructuring in energy conversion

Prof. Julien Bachmann

S1/03 - 226
15:00
Highlight Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage
Session starts at 14:30
Spatial Atmospheric ALD: a scalable technique for the deposition of Zinc Oxysulfide Buffer Layers for CIGS Solar Cells

Dr. Fieke van den Bruele Dr. Andrea Illiberi Dr. Paul Poodt Dr. Pieter Jan Bolt Corné Frijters

S1/03 - 226
15:15
Highlight Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage
Session starts at 14:30
Recent advances in Atomic Layer Processing of materials for emerging microelectronic device fabrication

Prof. Dr. Marceline Bonvalot Samia Belahcen Vincent Pesce Dr. Rémy Gassilloud Prof. Dr. Patrice Gonon Ahmad Bsiesy Prof. Dr. Christphe Vallée Dr. Ahmad Chaker

S1/03 - 226
15:30
Highlight Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage
Session starts at 14:30
Challenges and Opportunities for Atomic Layer Deposition of Two-Dimensional Materials in Nanoelectronic Applications

Benjamin Groven Dr. Yoann Tomczak Haodong Zhang Ankit Nalin Mehta Dr. Hugo Bender Dr. Tom Schram Dr. Quentin Smets Prof. Dr. Wilfried Vandervorst Prof. Dr. Marc Heyns Dr. Matty Caymax Dr. Iuliana Radu Prof. Dr. Annelies Delabie

S1/03 - 226
15:45
Lecture P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
P05.2: Nanocoatings for Microelectronics, Energy Conversion and Storage
Session starts at 14:30
Atomic Layer Deposition of Spin Hall Active Platinum Thin Films

Michaela Lammel Richard Schlitz Dr. Akinwumi Abimbola Amusan Stefanie Schlicht Dr. Tommi Tynell Prof. Dr. Julien Bachmann Prof. Dr. Georg Woltersdorf Prof. Dr. Kornelius Nielsch Prof. Dr. Sebastian T.B. Goennenwein Dr. Andy Thomas

S1/03 - 226

Poster P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
Session starts at 09:30
Atomic layer deposition of topological insulator selenides and tellurides

Dr. Tommi Tynell Prof. Dr. Kornelius Nielsch Dr. Andy Thomas

Poster P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
Session starts at 09:30
Edge-On MoS2 Thin Films by Direct Atomic Layer Deposition for Hydrogen Evolution Reaction

Dr. Changdeuck Bae Dr. Thi Anh Ho Prof. Dr. Hyunjung Shin

Poster P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
Session starts at 09:30
Formation of Bulk Layered Heterojunctions by Atomic Layer Deposition for Efficient Electrocatalyst

Dr. Changdeuck Bae Dr. Thi Anh Ho Prof. Dr. Hyunjung Shin

Poster P05: Advances in Atomic Layer Deposition Technologies: Conformal Thin Films and Hybrid Materials for Energy, Electronics and Health
Session starts at 09:30
Resonant Tunneling Induced Enhancement of Electron Emission by Ultra-Thin Coatings

Dr. Robert Zierold Christian Henkel Adithya Kommini Stefanie Haugg Chris Thomason Prof. Zlatan Aksamija Prof. Dr. Robert Blick

Poster F06: Materials Design for Electrochemical Energy Storage
Session starts at 09:30
Studies on hard carbon as a potential anode material for Na-ion batteries

Dr. Daria Mikhailova Julia Linnemann Sebastian Maletti Kevin Geishendorf Dr. Jonas Pampel Dr. Susanne Dörfler Dr. Lars Giebeler

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