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Solid-state dewetting of Au coatings on GLAD thin films acting as a template

Thursday (27.09.2018)
16:00 - 16:15 S1/03 - 226
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The popularity of solid-state dewetting by annealing has been increasing lately as fabrication route for nanoparticle arrays of controlled shape, spacing and periodicity. One of the most successful approaches include the dewetting of metal thin films on pre-patterned substrates although the patterning usually involves 2D fabrication methods that are time-consuming and expensive. Thin films of oxides grown by Physical Vapor Deposition at Glancing Angles (PVD-GLAD), present the shape of bundled tilted nanocolumns and offer an alternative straightforward fabrication method to pattern a substrate. In this study we present the dewetting by annealing of Au thin films deposited at normal incidence onto bundled nanocolumnar SiO2 thin films grown by GLAD, both deposited by using an electron beam. The width and shape of the tip of the bundles influence the metal local atom flux arriving to them during growth and limit the diffusion paths while annealing. This leads to the formation of independent particles on top of the bundles forming 2D particle arrays. The influence of the GLAD thin film features and the Au film thickness is analyzed and discussed.


Dr. Manuel Oliva-Ramírez
Technische Universität Ilmenau
Additional Authors:
  • Dr. Dong Wang
    Technische Universität Ilmenau
  • Dr. Víctor J. Rico Gavira
    Spanish National Research Council (CSIC)
  • Prof. Dr. Augustin R. González-Elipe
    Spanish National Research Council (CSIC)
  • Prof. Dr. Peter Schaaf
    Technische Universität Ilmenau