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Accurion GmbH

Accurion was founded in 1991 as „Nanofilm Technologie GmbH“. It was originally a spin-off from the Max Planck Institute for biophysical chemistry in Goettingen. The company started out with designing the Brewster angle microscope for the characterization of ultrathin films.

As these microscopes turned out to be quite sensitive to vibrations the division of active vibration isolation followed shortly after in 1992.

Ever since Accurion supplies advanced instrumentation for challenging measurement tasks with its two divisions thin film characterization and active vibration isolation.

34 employees help to develop, manufacture and distribute these products. Branch offices in the US, India and China and over 20 resellers provide a global sales and service structure.

Imaging Ellipsometry allows precise measurement of optical properties and layer thicknesses down to 0.1nm. It combines ellipsometry with microscopy to enable measurements on small structures with a lateral resolution down to 1 µm. All pixels are measured in parallel. Direct ellipsometric contrast images provide a fast detection of defects and contaminations.

Application fields are 2D materials, MEMS, biochips, solar cells, flat panels, Langmuir-Blodgett films, polymers, etc.

Within the field of quality control our referenced spectroscopic ellipsometer (RSE) combines high speed (100 spectra per second) with the accuracy of an ellipsometric measurement.

Active vibration isolation is the most effective solution to isolate sensitive equipment from disturbing vibrations and key to precise and repeatable results. The working principle is the active compensation of vibrations by generating a counterforce. Application examples can be found within hardness testing, scanning probe microscopy, scanning electron microscopy, micromanipulation, nanoindentation and profilometry.

Download Brochure Imaging Ellipsometer EP4

Download Brochure ActiveVibration-Isolation

Accurion GmbH

Stresemannstraße 30
37079 Göttingen
 +49 (0) 551-999 600
 +49 (0) 551-999 601 0

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